| dc.contributor.advisor | Henry I. Smith. | en_US |
| dc.contributor.author | Early, Kathleen | en_US |
| dc.date.accessioned | 2005-08-10T23:58:14Z | |
| dc.date.available | 2005-08-10T23:58:14Z | |
| dc.date.copyright | 1991 | en_US |
| dc.date.issued | 1991 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/13852 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1991. | en_US |
| dc.description | Includes bibliographical references (leaves 179-187). | en_US |
| dc.description.statementofresponsibility | by Kathleen Regina Early. | en_US |
| dc.format.extent | 187 leaves | en_US |
| dc.format.extent | 12734288 bytes | |
| dc.format.extent | 12734046 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Electrical Engineering and Computer Science | en_US |
| dc.title | Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 24652458 | en_US |
