Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography
Author(s)
Early, Kathleen![Thumbnail](/bitstream/handle/1721.1/13852/24652458-MIT.pdf.jpg?sequence=5&isAllowed=y)
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Advisor
Henry I. Smith.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1991. Includes bibliographical references (leaves 179-187).
Date issued
1991Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science