| dc.contributor.author | Kopell, Nancy | |
| dc.contributor.author | Scholvin, Jorg | |
| dc.contributor.author | Zorzos, Anthony Nicholas | |
| dc.contributor.author | Kinney, Justin | |
| dc.contributor.author | Bernstein, Jacob G | |
| dc.contributor.author | Moore-Kochlacs, Caroline | |
| dc.contributor.author | Fonstad Jr, Clifton G | |
| dc.contributor.author | Boyden, Edward | |
| dc.date.accessioned | 2018-09-28T14:58:04Z | |
| dc.date.available | 2018-09-28T14:58:04Z | |
| dc.date.issued | 2018-08 | |
| dc.date.submitted | 2018-08 | |
| dc.identifier.issn | 2072-666X | |
| dc.identifier.uri | http://hdl.handle.net/1721.1/118191 | |
| dc.description.abstract | We devised a scalable, modular strategy for microfabricated 3-D neural probe synthesis. We constructed a 3-D probe out of individual 2-D components (arrays of shanks bearing close-packed electrodes) using mechanical self-locking and self-aligning techniques, followed by electroless nickel plating to establish electrical contact between the individual parts. We detail the fabrication and assembly process and demonstrate different 3-D probe designs bearing thousands of electrode sites. We find typical self-alignment accuracy between shanks of <0.2° and demonstrate orthogonal electrical connections of 40 µm pitch, with thousands of connections formed electrochemically in parallel. The fabrication methods introduced allow the design of scalable, modular electrodes for high-density 3-D neural recording. The combination of scalable 3-D design and close-packed recording sites may support a variety of large-scale neural recording strategies for the mammalian brain. | en_US |
| dc.description.sponsorship | National Institutes of Health (U.S.) (Award DP1NS087724) | en_US |
| dc.description.sponsorship | National Institutes of Health (U.S.) (Grant R01NS067199) | en_US |
| dc.description.sponsorship | National Institutes of Health (U.S.) (Grant 2R44NS070453-03A1) | en_US |
| dc.description.sponsorship | National Institutes of Health (U.S.) (Grant 1R01NS102727) | en_US |
| dc.description.sponsorship | National Institutes of Health (U.S.) (Grant 1R43MH101943) | en_US |
| dc.description.sponsorship | National Institutes of Health (U.S.) (Grant 1R43MH109332) | en_US |
| dc.description.sponsorship | National Institutes of Health (U.S.) (Grant 1R24MH106075) | en_US |
| dc.description.sponsorship | National Institutes of Health (U.S.) (Grant R01DA029639) | en_US |
| dc.description.sponsorship | National Science Foundation (U.S.) (Grant DMS-1042134) | en_US |
| dc.description.sponsorship | National Science Foundation (U.S.) (Grant CBET-1053233) | en_US |
| dc.description.sponsorship | United States. Defense Advanced Research Projects Agency (Grant HR0011-14-2-0004) | en_US |
| dc.publisher | Multidisciplinary Digital Publishing Institute | en_US |
| dc.relation.isversionof | http://dx.doi.org/10.3390/mi9090436 | en_US |
| dc.rights | Creative Commons Attribution | en_US |
| dc.rights.uri | http://creativecommons.org/licenses/by/4.0/ | en_US |
| dc.source | Multidisciplinary Digital Publishing Institute | en_US |
| dc.title | Scalable, Modular Three-Dimensional Silicon Microelectrode Assembly via Electroless Plating | en_US |
| dc.type | Article | en_US |
| dc.identifier.citation | Scholvin, Jörg et al. "Scalable, Modular Three-Dimensional Silicon Microelectrode Assembly via Electroless Plating." Micromachines 9, 9 (August 2018): 436 © 2018 The Authors | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Media Laboratory | en_US |
| dc.contributor.mitauthor | Scholvin, Jorg | |
| dc.contributor.mitauthor | Zorzos, Anthony Nicholas | |
| dc.contributor.mitauthor | Kinney, Justin | |
| dc.contributor.mitauthor | Bernstein, Jacob G | |
| dc.contributor.mitauthor | Moore-Kochlacs, Caroline | |
| dc.contributor.mitauthor | Fonstad Jr, Clifton G | |
| dc.contributor.mitauthor | Boyden, Edward | |
| dc.relation.journal | Micromachines | en_US |
| dc.eprint.version | Final published version | en_US |
| dc.type.uri | http://purl.org/eprint/type/JournalArticle | en_US |
| eprint.status | http://purl.org/eprint/status/PeerReviewed | en_US |
| dc.date.updated | 2018-09-21T07:11:57Z | |
| dspace.orderedauthors | Scholvin, Jörg; Zorzos, Anthony; Kinney, Justin; Bernstein, Jacob; Moore-Kochlacs, Caroline; Kopell, Nancy; Fonstad, Clifton; Boyden, Edward | en_US |
| dspace.embargo.terms | N | en_US |
| dc.identifier.orcid | https://orcid.org/0000-0003-4167-440X | |
| dc.identifier.orcid | https://orcid.org/0000-0002-8381-7555 | |
| dc.identifier.orcid | https://orcid.org/0000-0002-5199-7627 | |
| dc.identifier.orcid | https://orcid.org/0000-0002-8369-5308 | |
| dc.identifier.orcid | https://orcid.org/0000-0002-0419-3351 | |
| mit.license | PUBLISHER_CC | en_US |