dc.contributor.advisor | Stephen D. Senturia. | en_US |
dc.contributor.author | Gupta, Raj K., Ph. D. 1969- | en_US |
dc.date.accessioned | 2005-08-18T20:47:37Z | |
dc.date.available | 2005-08-18T20:47:37Z | |
dc.date.copyright | 1997 | en_US |
dc.date.issued | 1997 | en_US |
dc.identifier.uri | http://hdl.handle.net/1721.1/10454 | |
dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. | en_US |
dc.description | Includes bibliographical references (leaves 59-64). | en_US |
dc.description.statementofresponsibility | by Raj K. Gupta. | en_US |
dc.format.extent | 68 leaves | en_US |
dc.format.extent | 6484705 bytes | |
dc.format.extent | 6484465 bytes | |
dc.format.mimetype | application/pdf | |
dc.format.mimetype | application/pdf | |
dc.language.iso | eng | en_US |
dc.publisher | Massachusetts Institute of Technology | en_US |
dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
dc.subject | Electrical Engineering and Computer Science | en_US |
dc.title | Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS) | en_US |
dc.type | Thesis | en_US |
dc.description.degree | Ph.D. | en_US |
dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
dc.identifier.oclc | 37658953 | en_US |