Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS)
Author(s)
Gupta, Raj K., Ph. D. 1969-![Thumbnail](/bitstream/handle/1721.1/10454/37658953-MIT.pdf.jpg?sequence=5&isAllowed=y)
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Advisor
Stephen D. Senturia.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. Includes bibliographical references (leaves 59-64).
Date issued
1997Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science