This is an archived course. A more recent version may be available at ocw.mit.edu.

 

Lecture Notes

The lecture notes for this course are available in a single file (PDF - 2.4MB). The lecture notes files in the table are the slides shown in class.

LEC # TOPICS LECTURE NOTES
1 Introduction: signals from electron-specimen interactions; electron detectors; scanning electron imaging (backscattered and secondary electron, BSE and SE); qualitative analysis using BSE imaging and energy dispersive spectrometry (EDS); introduction to X-ray mapping and semi-quantitative analysis (PDF - 4.0MB)
2 X-ray generation, emission, detection and measurement; wavelength dispersive spectrometer (WDS); analyzing crystals and proportional counters; WDS signal processing with single channel analyzer; compositional imaging (X-ray mapping) using WDS (PDF - 4.0MB)
3 Quantitative analysis using WDS; sample preparation; carbon coating; peak and background in WD spectra; detector settings through pulse height analysis; peak overlap corrections (PDF)
4 Matrix (ZAF) corrections in quantitative analysis; φ(ρz) corrections (PDF)