| dc.contributor.advisor | Eugene A. Fitzgerald. | en_US |
| dc.contributor.author | Currie, Matthew Thomas, 1973- | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. | en_US |
| dc.date.accessioned | 2005-08-23T15:18:14Z | |
| dc.date.available | 2005-08-23T15:18:14Z | |
| dc.date.copyright | 2001 | en_US |
| dc.date.issued | 2001 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/8784 | |
| dc.description | Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2001. | en_US |
| dc.description | Includes bibliographical references (p. 184-191). | en_US |
| dc.description.abstract | | en_US |
| dc.description.statementofresponsibility | by Matthew Thomas Currie. | en_US |
| dc.format.extent | 191 p. | en_US |
| dc.format.extent | 13591098 bytes | |
| dc.format.extent | 13590855 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Materials Science and Engineering. | en_US |
| dc.title | SiGe virtual substrate engineering for integration of III-V materials, microelectromechanical systems, and strained silicon MOSFETs with silicon | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Materials Science and Engineering | |
| dc.identifier.oclc | 48172043 | en_US |
