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Sol-gel synthesis of one-dimensional photonic bandgap structures
(Massachusetts Institute of Technology, 1999)
A series of one-dimensional photonic bandgap devices were fabricated using SiO2 and TiO2 films deposited from solution by the sol-gel method. A dielectric mirror, or broadband interference filter, was fabricated by alternating ...
Electrical study of molybdenum in silicon and fluorinated SiO₂ for interlayer dielectrics
(Massachusetts Institute of Technology, 1999)
Molybdenum is unintentionally introduced into silicon at various points in semiconductor processing. This introduction is a concern because molybdenum introduces a deep level state into the forbidden gap of silicon, degrading ...