Polycrystalline Si thin films and devices : I. Seed selection through ion channeling II. Thin-film transistors
Author(s)
Kung, Kenneth Ting-Yuan![Thumbnail](/bitstream/handle/1721.1/69699/18494059-MIT.pdf.jpg?sequence=5&isAllowed=y)
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Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor
Rafael Reif.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1988. Bibliography: leaves 109-116.
Date issued
1988Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.