Beam simulation studies of plasma-surface interactions in fluorocarbon etching of Si and SiO2
Author(s)
Gray, David Charles![Thumbnail](/bitstream/handle/1721.1/13187/26680838-MIT.pdf.jpg?sequence=5&isAllowed=y)
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Advisor
Herbert H. Sawin.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992. Includes bibliographical references (p. 376-384).
Date issued
1992Department
Massachusetts Institute of Technology. Department of Chemical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering