Characterization of perfluorocompound emission and abatement kinetics in plasma processes
Author(s)
Mohindra, Vivek![Thumbnail](/bitstream/handle/1721.1/11264/34791354-MIT.pdf.jpg?sequence=5&isAllowed=y)
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Advisor
Herbert H. Swain.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1996. Includes bibliographical references (leaves 136-142).
Date issued
1996Department
Massachusetts Institute of Technology. Department of Chemical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering