Browsing MIT Libraries by Author "Cai, Hong, Ph. D. Massachusetts Institute of Technology"
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Modeling of pattern dependencies in the fabrication of multilevel copper metallization
Cai, Hong, Ph. D. Massachusetts Institute of Technology (Massachusetts Institute of Technology, 2007)Multilevel copper metallization for Ultra-Large-Scale-Integrated (ULSI) circuits is a critical technology needed to meet performance requirements for advanced interconnect technologies with sub-micron dimensions. It is ...