| dc.contributor.author | Ajuria, Sergio | en_US |
| dc.contributor.author | Quek, Hui Meng | en_US |
| dc.contributor.author | Thompson, Carl V. | en_US |
| dc.contributor.author | Smith, Henry I. | en_US |
| dc.contributor.author | Kim, Hyoung-June | en_US |
| dc.contributor.author | Atwater, Harry A. | en_US |
| dc.contributor.author | Floro, Jerrold A. | en_US |
| dc.contributor.author | Frost, Harold J. | en_US |
| dc.contributor.author | Palmer, Joyce E. | en_US |
| dc.contributor.author | Chong, Tow | en_US |
| dc.contributor.author | Fonstad, Clifton G. | en_US |
| dc.contributor.author | Im, James S. | en_US |
| dc.contributor.author | Tomita, Hisashi | en_US |
| dc.contributor.author | Smith, David A. | en_US |
| dc.contributor.author | Jiran, Eva | en_US |
| dc.contributor.author | Cammarata, Robert C. | en_US |
| dc.contributor.author | Clevenger, Lawrence A. | en_US |
| dc.contributor.author | Tu, King-Ning | en_US |
| dc.contributor.author | Cho, Jaeshin | en_US |
| dc.contributor.author | Kahn, Hal | en_US |
| dc.contributor.author | Longworth, Hai P. | en_US |
| dc.contributor.author | Ro, Jaesang | en_US |
| dc.contributor.author | Dubner, Andrew D. | en_US |
| dc.contributor.author | Melngailis, John | en_US |
| dc.date.accessioned | 2010-07-16T03:48:32Z | |
| dc.date.available | 2010-07-16T03:48:32Z | |
| dc.date.issued | 1987-01-01 to 1987-12-31 | en_US |
| dc.identifier | RLE_PR_130_02 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/57032 | |
| dc.description | Contains reports on seven research projects. | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ECS 85-06565) | en_US |
| dc.description.sponsorship | U.S. Air Force - Office of Scientific Research (Contract AFOSR 85-0154) | en_US |
| dc.description.sponsorship | Semiconductor Research Corporation (Contract 87-SP-080) | en_US |
| dc.description.sponsorship | International Business Machines, Inc. (Faculty Development Award) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant DMR 85-06030) | en_US |
| dc.description.sponsorship | International Business Machines, Inc. | en_US |
| dc.description.sponsorship | Sony Company | en_US |
| dc.description.sponsorship | Joint Services Electroncs Program (Contract DAALO3-86-K-0002) | en_US |
| dc.description.sponsorship | Charles Stark Draper Laboratories, Inc. (Contract DL-H-261827) | en_US |
| dc.description.sponsorship | Defense Advanced Research Projects Agency (Contract MDA 903-85-C-0215) | en_US |
| dc.description.sponsorship | Nippon Telephone and Telegraph, Inc. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1987 | en_US |
| dc.relation.ispartof | Kinetic Phenomena in Thin Film Electronic Materials | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 130 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Kinetic Phenomena in Thin Film Electronic Materials | en_US |
| dc.subject.other | Grain Growth in Thin Films | en_US |
| dc.subject.other | Post-Nucleation Heteroepitaxy in Lattice Mismatched Systems | en_US |
| dc.subject.other | Thin Film Zone Melting Recrystallization of Silicon | en_US |
| dc.subject.other | Capillary Instabilities in Thin Solid Films | en_US |
| dc.subject.other | Kinetics of Thin Film Silicide Formation | en_US |
| dc.subject.other | Reliability of Interconnects | en_US |
| dc.subject.other | Microstructures of Interconnects | en_US |
| dc.subject.other | Focussed Ion Beam Induced Deposition | en_US |
| dc.title | Kinetic Phenomena in Thin Film Electronic Materials | en_US |
| dc.type | Technical Report | en_US |
