Browsing RLE Progress Report, No. 124 (1982) by Author "Atwater, Harry A."

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    • Submicron Structures Fabrication and Research 

      Smith, Henry I.; Hawryluk, Andrew M.; Melngailis, John J.; Schatterbug, Mark L.; Ceglio, Natale M., Jr.; e.a. (Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT), 1982-01)