Simplified Model and Numerical Analysis of Multi-layered Piezoelectric Diaphragm

Abstract

The validity of the dynamic analysis based on simplified plate model was investigated using of FE-codes ANSYS in the present paper. The simplified clamped multi-layered plate model was first verified by comparison with the exact model. The simply supported plate model was confirmed to be not a suitable model due to its large error as comparing with exact model. Influence of dimensions of laminar diaphragm on nature frequencies was studied. Deflection and voltage response driven by mechanical and electric loads were described. The optimized thickness ratio of PZT layer to SiO₂ and Si layers was given in the paper to obtain the best deflection export of actuator in design.